What's LithoVision all about?
LithoVision is the premier technical event that brings together industry experts with the objective of sharing a global view of future lithography trends, challenges, and innovations with Nikon customers and industry partners. The 14th annual LithoVision Technical Symposium will be held prior to SPIE Advanced Lithography on Sunday, February 26, 2017.
As Nikon celebrates its 100th anniversary year, the 2017 event will feature an excellent agenda, distinguished presenters from across the industry, and special giveaways.
LithoVision will be held at the City National Civic (formerly the San Jose Civic Auditorium) in downtown San Jose. This venue is conveniently located within walking distance from the Convention Center and area hotels.
LithoVision 2017 incorporates an afternoon of thought-provoking viewpoints highlighting "A New Era of Manufacturing Integration." The 2017 agenda features presentations by prominent industry representatives including:
Lithography Status Chipmaker View
Dr. Mark Phillips, Intel Corporation
Industry Litho Drivers/Requirements and Nikon Roadmap
Yuichi Shibazaki, Nikon Corporation
Patterning in a Sub-5 nm Era
Dr. Ben Rathsack, Tokyo Electron America
Enabling Production Beyond 7 nm...
Ryoichi Kawaguchi, Nikon Corporation
Integrated Metrology and Control
Dr. Ady Levy, KLA-Tencor
Dr. Zhibiao Mao, Huali Microelectronics Corporation
Total Edge Placement Error Control for IC Manufacturing in 2020
Dr. John Sturtevant, Mentor Graphics
An interactive poster session and reception will cap off the evening.
LithoVision has been repeatedly lauded for the exceptional technical content, as well as the enjoyable social format. Registration is limited, so sign-up today.
Sunday, February 26, 2017
City National Civic - San Jose, CA
1:00 PM - 2:00 PM:
2:00 PM - 5:30 PM:
5:30 PM - 7:00 PM:
Poster Session and Reception